Lithography steppers are pivotal in the semiconductor manufacturing process, where supreme accuracy is non-negotiable. These machines deploy a series of engineered components that work in concert to imprint minuscule circuit patterns onto silicon wafers. Understanding these parts' roles and functions shines a light on the marvels of modern manufacturing techniques.
The Optical System
The optical system serves as the cornerstone of the lithography stepper. Comprising precision lenses and mirrors, it channels ultraviolet light with immense accuracy.